Invention Grant
US08272268B2 Triaxial acceleration sensor 有权
三轴加速度传感器

Triaxial acceleration sensor
Abstract:
An acceleration sensor includes a substrate, a rocker mass, a z spring connected to the rocker mass, which allows the rocker mass to rotate about an axis, and at least one additional spring system connected to the substrate and the rocker mass. The additional spring system allows the rocker mass to deflect in an x or y direction oriented parallel or perpendicular to the axis. The z spring or the additional spring system allows the rocker mass to deflect in a y or x direction oriented parallel or perpendicular to the axis.
Public/Granted literature
Information query
Patent Agency Ranking
0/0