Invention Grant
US08273638B2 Thin film transistor using a metal induced crystallization process and method for fabricating the same and active matrix flat panel display using the thin film transistor
有权
使用金属诱导结晶工艺的薄膜晶体管及其制造方法以及使用该薄膜晶体管的有源矩阵平板显示器
- Patent Title: Thin film transistor using a metal induced crystallization process and method for fabricating the same and active matrix flat panel display using the thin film transistor
- Patent Title (中): 使用金属诱导结晶工艺的薄膜晶体管及其制造方法以及使用该薄膜晶体管的有源矩阵平板显示器
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Application No.: US11968365Application Date: 2008-01-02
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Publication No.: US08273638B2Publication Date: 2012-09-25
- Inventor: Jae-Bon Koo , Sang-Gul Lee
- Applicant: Jae-Bon Koo , Sang-Gul Lee
- Applicant Address: KR Yongin
- Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee: Samsung Mobile Display Co., Ltd.
- Current Assignee Address: KR Yongin
- Agency: H.C. Park & Associates, PLC
- Priority: KR2003-85247 20031127
- Main IPC: C30B1/08
- IPC: C30B1/08 ; C09K19/00

Abstract:
Provided is a thin film transistor that may be manufactured using Metal Induced Crystallization (MIC) and method for fabricating the same. Also provided is an active matrix flat panel display using the thin film transistor, which may be created by forming a crystallization inducing metal layer below a buffer layer and diffusing the crystallization inducing metal layer. The thin film transistor may include a crystallization inducing metal layer formed on an insulating substrate, a buffer layer formed on the crystallization inducing metal layer, and an active layer formed on the buffer layer and including source/drain regions, and including polycrystalline silicon crystallized by the MIC process.
Public/Granted literature
Information query
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