发明授权
- 专利标题: Electrostatic actuator apparatus
- 专利标题(中): 静电执行机构
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申请号: US13444953申请日: 2012-04-12
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公开(公告)号: US08274324B2公开(公告)日: 2012-09-25
- 发明人: Tamio Ikehashi
- 申请人: Tamio Ikehashi
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Turocy & Watson, LLP
- 优先权: JP2010-031820 20100216
- 主分类号: G05F1/10
- IPC分类号: G05F1/10 ; H01G5/00
摘要:
According to one embodiment, an electrostatic actuator apparatus includes a first voltage generation circuit configured to generate a first voltage, a first switch connected between the first voltage generation circuit and a first node, a second voltage generation circuit configured to generate a second voltage, a second switch connected between the second voltage generation circuit and a second node, a capacitor connected between the first node and the second node, an electrostatic actuator having a drive electrode connected to the first node, and a control circuit configured to perform an operation of sequentially turning on the first switch, turning off the first switch and turning on the second switch when the electrostatic actuator is driven.
公开/授权文献
- US20120200239A1 ELECTROSTATIC ACTUATOR APPARATUS 公开/授权日:2012-08-09
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