Invention Grant
US08276540B2 Method and system for introducing process fluid through a chamber component 失效
通过腔室部件引入工艺流体的方法和系统

Method and system for introducing process fluid through a chamber component
Abstract:
A method and system for introducing a process fluid through a chamber component in a processing system is described. The chamber component comprises a chamber element having a first surface on a supply side of the chamber element and a second surface on a process side of the chamber element, wherein the process side is opposite the supply side. Furthermore, the chamber component comprises a conduit extending through the chamber element from the supply side to the process side, wherein the conduit comprises an inlet configured to receive a process fluid and an outlet configured to distribute the process fluid.
Information query
Patent Agency Ranking
0/0