发明授权
- 专利标题: Magnetic head inspection method and magnetic head inspection device
- 专利标题(中): 磁头检查方法和磁头检测装置
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申请号: US12394041申请日: 2009-02-27
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公开(公告)号: US08278917B2公开(公告)日: 2012-10-02
- 发明人: Tsuneo Nakagomi , Teruaki Tokutomi
- 申请人: Tsuneo Nakagomi , Teruaki Tokutomi
- 申请人地址: JP Tokyo
- 专利权人: Hitachi High-Technologies Corporation
- 当前专利权人: Hitachi High-Technologies Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Jianq Chyun IP Office
- 优先权: JP2008-048349 20080228; JP2008-263746 20081010
- 主分类号: G01R33/12
- IPC分类号: G01R33/12
摘要:
A magnetic head inspection device inspects the write track width of a thin film magnetic head in a phase as early as possible during the manufacturing process. A recording signal (excitation signal) is input from bonding pads to the thin film magnetic head in a rowbar, and the magnetic field generated by the write pole (element) included in the thin film magnetic head is observed directly by using a magnetic force microscope (MFM), a scanning Hall probe microscope (SHPM), or a scanning magneto resistance effect microscope (SMRM) that performs a scanning motion at a position equivalent to the flying height of the magnetic head. In this manner, a shape of the generated magnetic field instead of the physical shape of the write pole (element) is measured; thus, a non-destructive inspection can be performed on the effective magnetic track width.
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