发明授权
- 专利标题: Deforming mechanism, exposure apparatus, and device manufacturing method
- 专利标题(中): 变形机构,曝光装置和装置制造方法
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申请号: US12481101申请日: 2009-06-09
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公开(公告)号: US08279398B2公开(公告)日: 2012-10-02
- 发明人: Takeshi Sato
- 申请人: Takeshi Sato
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Fitzpatrick, Cella, Harper & Scinto
- 优先权: JP2008-153396 20080611; JP2009-135825 20090605
- 主分类号: G03B27/68
- IPC分类号: G03B27/68 ; G03B27/52
摘要:
A deforming mechanism for deforming a transmissive optical element comprises a rotation member configured to hold the optical element and to rotate around an axis parallel to a tangential line of a circumference of the optical element at a portion where the rotation member holds the optical element, so as to deform the optical element by the rotation, a torque generating unit configured to generate a torque to rotate the rotation member around the axis, a holding base, and an elastic member connecting the holding base to the torque generating unit.
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