发明授权
US08279398B2 Deforming mechanism, exposure apparatus, and device manufacturing method 有权
变形机构,曝光装置和装置制造方法

Deforming mechanism, exposure apparatus, and device manufacturing method
摘要:
A deforming mechanism for deforming a transmissive optical element comprises a rotation member configured to hold the optical element and to rotate around an axis parallel to a tangential line of a circumference of the optical element at a portion where the rotation member holds the optical element, so as to deform the optical element by the rotation, a torque generating unit configured to generate a torque to rotate the rotation member around the axis, a holding base, and an elastic member connecting the holding base to the torque generating unit.
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