发明授权
- 专利标题： MEMS-scanning mirror device and method for manufacturing the same
- 专利标题（中）： MEMS扫描镜装置及其制造方法
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申请号： US12588804申请日： 2009-10-28
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公开(公告)号： US08279509B2公开(公告)日： 2012-10-02
- 发明人: Hirotake Maruyama , Makoto Fujino , Hirokazu Tamura
- 申请人： Hirotake Maruyama , Makoto Fujino , Hirokazu Tamura
- 申请人地址： JP Tokyo
- 专利权人： Kabushiki Kaisha Topcon
- 当前专利权人： Kabushiki Kaisha Topcon
- 当前专利权人地址： JP Tokyo
- 代理机构： Wenderoth, Lind & Ponack, L.L.P.
- 优先权： JP2008-277897 20081029
- 主分类号： G02B26/08
- IPC分类号： G02B26/08
摘要：
An MEMS-scanning mirror device includes an electrostatic comb actuator, in which a mirror surface is formed below a top surface (TOPS) of the mirror device. In a method for manufacturing the MEMS-scanning mirror device having the electrostatic comb actuator, a mirror surface (10BS) of a mirror plate (10B) is formed by removing an insulating layer (I) thereon.