Invention Grant
- Patent Title: Liquid material vaporizer
- Patent Title (中): 液体材料蒸发器
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Application No.: US12295862Application Date: 2007-04-04
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Publication No.: US08280235B2Publication Date: 2012-10-02
- Inventor: Ichiro Nishikawa , Takeshi Kawano
- Applicant: Ichiro Nishikawa , Takeshi Kawano
- Applicant Address: JP Kyoto-shi
- Assignee: Horiba Stec, Co., Ltd.
- Current Assignee: Horiba Stec, Co., Ltd.
- Current Assignee Address: JP Kyoto-shi
- Agency: Alleman Hall McCoy Russell & Tuttle LLP
- Priority: JP2006-103803 20060405
- International Application: PCT/JP2007/057593 WO 20070404
- International Announcement: WO2007/114474 WO 20071011
- Main IPC: F24H1/18
- IPC: F24H1/18
Abstract:
A liquid material vaporizer comprises a gas-liquid mixing section for mixing a liquid material and a carrier gas to generate a gas-liquid mixture; a heating type vaporizing section for vaporizing the gas-liquid mixture from the gas-liquid mixing section and exhausting outside with an assistance of the carrier gas a gas generated by the vaporization; a connecting section for making a connection between the gas-liquid mixing section and the vaporizing section, the connecting section having inside a flow path for the gas-liquid mixture; and a connecting section cooling section for cooling the connecting section. Thus, the liquid material vaporizer which performs suitable vaporization by preventing residue from being generated even in the case of vaporizing a liquid material composed of a plurality of materials having different boiling points.
Public/Granted literature
- US20090097831A1 LIQUID MATERIAL VAPORIZER Public/Granted day:2009-04-16
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