发明授权
US08283835B2 Guided bulk acoustic wave device having reduced height and method for manufacturing
有权
具有减小的高度的引导体声波装置和制造方法
- 专利标题： Guided bulk acoustic wave device having reduced height and method for manufacturing
- 专利标题（中）： 具有减小的高度的引导体声波装置和制造方法
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申请号： US12771407申请日： 2010-04-30
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公开(公告)号： US08283835B2公开(公告)日： 2012-10-09
- 发明人: Thomas Metzger , Christoph Eggs , Werner Ruile
- 申请人： Thomas Metzger , Christoph Eggs , Werner Ruile
- 申请人地址： DE Munich
- 专利权人： Epcos AG
- 当前专利权人： Epcos AG
- 当前专利权人地址： DE Munich
- 代理机构： Slater & Matsil, L.L.P.
- 主分类号： H01L41/04
- IPC分类号： H01L41/04
摘要：
Guided bulk acoustic wave devices and method for manufacturing guided bulk acoustic wave devices are provided. A guided bulk acoustic wave device includes a resonator structure with a piezoelectric layer, an electrode layer for exciting guided bulk acoustic waves and a wave guide layer. The thickness of the piezoelectric layer is less than or equal to 50 μm.