发明授权
- 专利标题: Gallium nitride-based semiconductor laser diode
- 专利标题(中): 氮化镓基半导体激光二极管
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申请号: US12837143申请日: 2010-07-15
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公开(公告)号: US08284811B2公开(公告)日: 2012-10-09
- 发明人: Takamichi Sumitomo , Yohei Enya , Yusuke Yoshizumi , Masaki Ueno , Katsushi Akita , Takashi Kyono
- 申请人: Takamichi Sumitomo , Yohei Enya , Yusuke Yoshizumi , Masaki Ueno , Katsushi Akita , Takashi Kyono
- 申请人地址: JP Osaka-shi
- 专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: JP Osaka-shi
- 代理机构: Venable LLP
- 代理商 Michael A. Sartori
- 优先权: JPP2009-167093 20090715
- 主分类号: H01S5/00
- IPC分类号: H01S5/00
摘要:
Provided is a III-nitride semiconductor laser diode capable of lasing to emit light of not less than 500 nm with use of a semipolar plane. Since an active layer 29 is provided so as to generate light at the wavelength of not less than 500 nm, the wavelength of light to be confined into a core semiconductor region 19 is a long wavelength. A first optical guide layer 27 is provided with a two-layer structure, and a second optical guide layer 31 is provided with a two-layer structure. A material of a cladding layer 21 comprised of at least either of AlGaN and InAlGaN is different from the III-nitride semiconductor, and the thickness D15 of a first epitaxial semiconductor region 15 is larger than the thickness D19 of the core semiconductor region 19; however, the misfit dislocation densities at first to third interfaces J1, J2 and J3 are not more than 1×106 cm−1, thereby preventing lattice relaxation from occurring in the semiconductor layers at these interfaces J1, J2 and J3 because of the c-plane that acts as a slip plane.
公开/授权文献
- US20110013657A1 GALLIUM NITRIDE-BASED SEMICONDUCTOR LASER DIODE 公开/授权日:2011-01-20
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