Invention Grant
- Patent Title: MEMS device fabricated on a pre-patterned substrate
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Application No.: US13369546Application Date: 2012-02-09
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Publication No.: US08285089B2Publication Date: 2012-10-09
- Inventor: Clarence Chui
- Applicant: Clarence Chui
- Applicant Address: US CA San Diego
- Assignee: Qualcomm MEMS Technologies, Inc.
- Current Assignee: Qualcomm MEMS Technologies, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Knobbe Martens Olson & Beal LLP
- Main IPC: G02B6/35
- IPC: G02B6/35 ; G02F1/29 ; H01L21/44
Abstract:
A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated from an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate light. A semi-reflective layer and a transparent material are formed over the movable upper electrode.
Public/Granted literature
- US20120140313A1 MEMS DEVICE FABRICATED ON A PRE-PATTERNED SUBSTRATE Public/Granted day:2012-06-07
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