发明授权
- 专利标题: Stage apparatus assembling method
- 专利标题(中): 舞台装置组装方法
-
申请号: US12710759申请日: 2010-02-23
-
公开(公告)号: US08286318B2公开(公告)日: 2012-10-16
- 发明人: Yasuzo Tanaka , Junpei Yuyama , Mitsuru Yahagi , Hirofumi Minami , Makoto Takahashi , Shinya Ito
- 申请人: Yasuzo Tanaka , Junpei Yuyama , Mitsuru Yahagi , Hirofumi Minami , Makoto Takahashi , Shinya Ito
- 申请人地址: JP Chigasaki-shi
- 专利权人: Ulvac, Inc.
- 当前专利权人: Ulvac, Inc.
- 当前专利权人地址: JP Chigasaki-shi
- 代理机构: Kratz, Quintos & Hanson, LLP
- 优先权: JP2007-221403 20070828
- 主分类号: B23Q17/00
- IPC分类号: B23Q17/00 ; B23P19/00 ; A47B11/00
摘要:
An assembling method that is high in assembly accuracy and easily performed at the actual installation site is provided. In this method, the sub base plates on the sub mounting tables are aligned with respect to a main base plate on a main mounting table at a temporary installation site, and the state thereof is maintained. Then, the main mounting table and the sub mounting tables are separated from each other to be transferred to the actual installation site, and the positioning state is restored at the actual installation site. Since a positional alignment can be performed at the temporary installation site, the work required at the actual installation site can be reduced. Furthermore, since a fine adjustment can be performed at the actual installation site, the accuracy in the positional alignment can be improved.
公开/授权文献
- US20100146762A1 STAGE APPARATUS ASSEMBLING METHOD 公开/授权日:2010-06-17
信息查询