发明授权
US08287250B2 Multistage vacuum pump unit and an operation method thereof 有权
多级真空泵单元及其操作方法

Multistage vacuum pump unit and an operation method thereof
摘要:
A multistage vacuum pump unit can save a power requirement and prevent the gas discharged outside of the unit from flowing-back inside the pump unit. A plurality of vacuum pumps are connected in series to form the multistage vacuum pump unit. A suction inlet of a first stage vacuum pump thereof is connected to a to-be-vacuumized container so that the space inside of the container becomes under a high vacuum condition. In an operating method, part of the gas discharged into a first intermediate passage from the first stage vacuum pump is branched during a low vacuum operation, and discharged toward an air atmosphere through a low conductance line provided with check valves that prevent the branched gas from flowing back.
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