发明授权
- 专利标题: Multistage vacuum pump unit and an operation method thereof
- 专利标题(中): 多级真空泵单元及其操作方法
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申请号: US12410116申请日: 2009-03-24
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公开(公告)号: US08287250B2公开(公告)日: 2012-10-16
- 发明人: Shiro Tanigawa
- 申请人: Shiro Tanigawa
- 申请人地址: JP
- 专利权人: Anest Iwata Corporation
- 当前专利权人: Anest Iwata Corporation
- 当前专利权人地址: JP
- 代理机构: Rossi, Kimms & McDowell LLP
- 优先权: JP2008-76234 20080324
- 主分类号: F04B23/04
- IPC分类号: F04B23/04 ; F04B23/00
摘要:
A multistage vacuum pump unit can save a power requirement and prevent the gas discharged outside of the unit from flowing-back inside the pump unit. A plurality of vacuum pumps are connected in series to form the multistage vacuum pump unit. A suction inlet of a first stage vacuum pump thereof is connected to a to-be-vacuumized container so that the space inside of the container becomes under a high vacuum condition. In an operating method, part of the gas discharged into a first intermediate passage from the first stage vacuum pump is branched during a low vacuum operation, and discharged toward an air atmosphere through a low conductance line provided with check valves that prevent the branched gas from flowing back.
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