发明授权
- 专利标题: Lateral passive device having dual annular electrodes
- 专利标题(中): 具有双环形电极的横向无源器件
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申请号: US12835283申请日: 2010-07-13
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公开(公告)号: US08288244B2公开(公告)日: 2012-10-16
- 发明人: David S. Collins , Jeffrey B. Johnson , Xuefeng Liu , Bradley A. Orner , Robert M. Rassel , David C. Sheridan
- 申请人: David S. Collins , Jeffrey B. Johnson , Xuefeng Liu , Bradley A. Orner , Robert M. Rassel , David C. Sheridan
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Hoffman Warnick LLC
- 代理商 Anthony Canale
- 主分类号: H01L21/76
- IPC分类号: H01L21/76 ; H01L29/00
摘要:
A method for forming a lateral passive device including a dual annular electrode is disclosed. The annular electrodes formed from the method include an anode and a cathode. The annular electrodes allow anode and cathode series resistances to be optimized to the lowest values at a fixed device area. In addition, the parasitic capacitance to a bottom plate (substrate) is greatly reduced.
公开/授权文献
- US20100279483A1 LATERAL PASSIVE DEVICE HAVING DUAL ANNULAR ELECTRODES 公开/授权日:2010-11-04
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