发明授权
- 专利标题： Microshells with integrated getter layer
- 专利标题（中）： 具有集成吸气剂层的微型壳
-
申请号： US13017844申请日： 2011-01-31
-
公开(公告)号： US08288835B2公开(公告)日： 2012-10-16
- 发明人: Emmanuel P. Quevy , Pezhman Monadgemi , Roger T. Howe
- 申请人： Emmanuel P. Quevy , Pezhman Monadgemi , Roger T. Howe
- 申请人地址： US TX Austin
- 专利权人： Silicon Laboratories Inc.
- 当前专利权人： Silicon Laboratories Inc.
- 当前专利权人地址： US TX Austin
- 代理机构： O'Keefe, Egan, Peterman & Enders LLP
- 主分类号： H01L29/84
- IPC分类号： H01L29/84
摘要：
Microshells including a perforated pre-sealing layer and an integrated getter layer are provided. The integrated getter layer may be disposed between other layers of a perforated pre-sealing layer. The perforated pre-sealing layer may include at least one perforation, and a sealing layer may be provided on the pre-sealing layer to close the perforation.
公开/授权文献
信息查询
IPC分类:
