Invention Grant
- Patent Title: Microshells with integrated getter layer
- Patent Title (中): 具有集成吸气剂层的微型壳
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Application No.: US13017844Application Date: 2011-01-31
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Publication No.: US08288835B2Publication Date: 2012-10-16
- Inventor: Emmanuel P. Quevy , Pezhman Monadgemi , Roger T. Howe
- Applicant: Emmanuel P. Quevy , Pezhman Monadgemi , Roger T. Howe
- Applicant Address: US TX Austin
- Assignee: Silicon Laboratories Inc.
- Current Assignee: Silicon Laboratories Inc.
- Current Assignee Address: US TX Austin
- Agency: O'Keefe, Egan, Peterman & Enders LLP
- Main IPC: H01L29/84
- IPC: H01L29/84
Abstract:
Microshells including a perforated pre-sealing layer and an integrated getter layer are provided. The integrated getter layer may be disposed between other layers of a perforated pre-sealing layer. The perforated pre-sealing layer may include at least one perforation, and a sealing layer may be provided on the pre-sealing layer to close the perforation.
Public/Granted literature
- US20110121412A1 PLANAR MICROSHELLS FOR VACUUM ENCAPSULATED DEVICES AND DAMASCENE METHOD OF MANUFACTURE Public/Granted day:2011-05-26
Information query
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