Invention Grant
US08292608B2 Apparatus for fixing plastic sheet and method of fabricating nano pattern on plastic sheet using the same 有权
用于固定塑料片的装置和使用其制造在塑料片上的纳米图案的方法

Apparatus for fixing plastic sheet and method of fabricating nano pattern on plastic sheet using the same
Abstract:
There are provided an apparatus for fixing a plastic sheet which fixes a plastic sheet to fabricate a nano pattern and a method of fabricating a nano pattern on a plastic sheet using the same. The apparatus for fixing a plastic sheet includes: a pair of planar metal guide rings interposingly fixing a plastic sheet from above and below, respectively; and a sheet fixing chuck including: a ring fixer sucking the pair of planar metal guide rings through a vacuum groove to be fixed thereto; and a sheet fixer having a plurality of vacuum pin holes formed therein, the vacuum pin holes sucking a bottom of the plastic sheet fixed by the planar metal guide rings. The apparatus allows fabrication of the nano pattern on the plastic sheet having less roughness than that of a semiconductor substrate or a glass substrate.
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