Invention Grant
US08292608B2 Apparatus for fixing plastic sheet and method of fabricating nano pattern on plastic sheet using the same
有权
用于固定塑料片的装置和使用其制造在塑料片上的纳米图案的方法
- Patent Title: Apparatus for fixing plastic sheet and method of fabricating nano pattern on plastic sheet using the same
- Patent Title (中): 用于固定塑料片的装置和使用其制造在塑料片上的纳米图案的方法
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Application No.: US12743117Application Date: 2008-05-21
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Publication No.: US08292608B2Publication Date: 2012-10-23
- Inventor: Kyung Hyun Kim , Chul Huh , Hyun Sung Ko , Jong Cheol Hong , Wan Joong Kim , Gun Yong Sung , Seon Hee Park
- Applicant: Kyung Hyun Kim , Chul Huh , Hyun Sung Ko , Jong Cheol Hong , Wan Joong Kim , Gun Yong Sung , Seon Hee Park
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: Nelson Mullins Riley & Scarborough LLP
- Agent EuiHoon Lee, Esq.
- Priority: KR10-2007-0123156 20071130
- International Application: PCT/KR2008/002814 WO 20080521
- International Announcement: WO2009/069866 WO 20090604
- Main IPC: B29C43/32
- IPC: B29C43/32

Abstract:
There are provided an apparatus for fixing a plastic sheet which fixes a plastic sheet to fabricate a nano pattern and a method of fabricating a nano pattern on a plastic sheet using the same. The apparatus for fixing a plastic sheet includes: a pair of planar metal guide rings interposingly fixing a plastic sheet from above and below, respectively; and a sheet fixing chuck including: a ring fixer sucking the pair of planar metal guide rings through a vacuum groove to be fixed thereto; and a sheet fixer having a plurality of vacuum pin holes formed therein, the vacuum pin holes sucking a bottom of the plastic sheet fixed by the planar metal guide rings. The apparatus allows fabrication of the nano pattern on the plastic sheet having less roughness than that of a semiconductor substrate or a glass substrate.
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