Invention Grant
- Patent Title: Dual path gas distribution device
- Patent Title (中): 双路气体分配装置
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Application No.: US12346195Application Date: 2008-12-30
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Publication No.: US08293013B2Publication Date: 2012-10-23
- Inventor: Jay Brian DeDontney
- Applicant: Jay Brian DeDontney
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/44 ; C23F1/00 ; H01L21/306 ; C23C16/06 ; C23C16/22

Abstract:
An apparatus for deploying two fluids separately into a reaction chamber is provided. The apparatus includes a first distribution network that is formed on a plate having a distribution face and a dispensing face. The first distribution network is defined by a plurality of recessed channels on the distribution face. The plurality of recessed channels includes a plurality of thru-ports that extend from the plurality of recessed channels to the dispensing face. The apparatus further includes a second distribution network that has passages formed below the plurality of recessed channels and above the dispensing face. A first set of ports extends from the passages to the distribution face and a second set of ports extends from a top surface of the distribution face to the dispensing face.
Public/Granted literature
- US20100167551A1 DUAL PATH GAS DISTRIBUTION DEVICE Public/Granted day:2010-07-01
Information query
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