A method for forming a ferroelectric spontaneous polarization reversal includes the steps of forming a convexo-concave structure on a top face of a ferroelectric substrate firstly, and then forming a ferroelectric spontaneous polarization region on the substrate including one portion of a convex portion, with a concave portion being formed on the bottom face of the substrate within a region where a ferroelectric spontaneous polarization reversal is to be formed and the convex portion is formed, and then applying an electric field into the substrate. The depth of the concave portion on the bottom face of the substrate may be greater than the height of the convex portion on the top face of the substrate. The width of the concave portion on the bottom face of the substrate may be wider than width of said convex portion on the top face of the substrate.