发明授权
- 专利标题: Semiconductor light-emitting device, surface-emission laser diode, and production apparatus thereof, production method, optical module and optical telecommunication system
- 专利标题(中): 半导体发光器件,表面发射激光二极管及其制造装置,制造方法,光模块和光通信系统
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申请号: US13165027申请日: 2011-06-21
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公开(公告)号: US08293555B2公开(公告)日: 2012-10-23
- 发明人: Takashi Takahashi , Morimasa Kaminishi , Shunichi Sato , Akihiro Itoh , Naoto Jikutani
- 申请人: Takashi Takahashi , Morimasa Kaminishi , Shunichi Sato , Akihiro Itoh , Naoto Jikutani
- 申请人地址: JP Tokyo
- 专利权人: Ricoh Company, Ltd.
- 当前专利权人: Ricoh Company, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Dickstein Shapiro LLP
- 优先权: JP2001-089068 20010327; JP2001-210462 20010711; JP2001-252537 20010823; JP2001-253382 20010823; JP2001-262902 20010831; JP2001-288367 20010921; JP2001-292958 20010926; JP2001-293353 20010926; JP2001-297936 20010927; JP2001-297937 20010927; JP2001-297938 20010927; JP2001-297939 20010927; JP2001-390927 20011225; JP2002-029822 20020206; JP2002-065431 20020311; JP2003-077419 20030320
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A semiconductor light-emitting device has a semiconductor layer containing Al between a substrate and an active layer containing nitrogen, wherein Al and oxygen are removed from a growth chamber before growing said active layer and a concentration of oxygen incorporated into said active layer together with Al is set to a level such that said semiconductor light-emitting device can perform a continuous laser oscillation at room temperature.
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