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US08293585B2 Solid-state imaging device and method for making the same 失效
固态成像装置及其制作方法

Solid-state imaging device and method for making the same
Abstract:
A solid-state imaging device includes a semiconductor substrate, one or more wiring interlayer films disposed on or above the semiconductor substrate, and one or more metal wires embedded in the wiring interlayer films. The one or more wiring interlayer films are composed of a diffusion preventing material that prevents the diffusion of the metal wire.
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