Invention Grant
- Patent Title: Micro-machined accelerometer
- Patent Title (中): 微加工加速度计
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Application No.: US12575837Application Date: 2009-10-08
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Publication No.: US08297121B2Publication Date: 2012-10-30
- Inventor: Régis Quer , Olivier Lefort , André Boura
- Applicant: Régis Quer , Olivier Lefort , André Boura
- Applicant Address: FR Neuilly-sur-Seine
- Assignee: Thales
- Current Assignee: Thales
- Current Assignee Address: FR Neuilly-sur-Seine
- Agency: Baker & Hostetler LLP
- Priority: FR0805615 20081010
- Main IPC: G01P15/097
- IPC: G01P15/097

Abstract:
A micromachined accelerometer in a flat plate includes a base and at least two resonator measuring cells provided with a common mobile seismic element, the two measuring cells being placed one on each side of the common mobile seismic element along the sensitive axis of the accelerometer, such that under the effect of an acceleration, the resonator of one measuring cell undergoes a traction while the resonator of the other measuring cell undergoes a compression, the measuring cells respectively configured to amplify the acceleration force generating the translation of the common mobile seismic element provided with a respective anchoring foot-piece. The common mobile seismic element includes at least two mobile seismic masses able to be displaced in translation along the sensitive axis of the accelerometer and/or in rotation with respect to a respective axis of rotation substantially orthogonal to the sensitive axis under the effect of an acceleration along the sensitive axis.
Public/Granted literature
- US20100089157A1 Micro-Machined Accelerometer Public/Granted day:2010-04-15
Information query
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