A movable deposition box (02) for silicon-based thin film solar cell comprises an electrode array composed of at least a group of cathode plates (203) and a piece of anode plate (208) which are set in movable chamber, wherein a feeding socket (203-1) is positioned on a circular or semicircular concave surface in the center area on the backside of the cathode plates (203), a circular or semicircular end face (201-1) of a feeding component (201) which has a flat middle part contacts the signal feeding socket (203-1) and feeds in RF/VHF power signal, the anode plate (208) is grounded, and a shield cover (204) of the cathode plate has through-hole (204-1) and is insulated from the cathode plate (203).