Invention Grant
US08298853B2 CMOS pixel sensor cells with poly spacer transfer gates and methods of manufacture
有权
具有聚间隔物传输门的CMOS像素传感器单元和制造方法
- Patent Title: CMOS pixel sensor cells with poly spacer transfer gates and methods of manufacture
- Patent Title (中): 具有聚间隔物传输门的CMOS像素传感器单元和制造方法
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Application No.: US12853795Application Date: 2010-08-10
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Publication No.: US08298853B2Publication Date: 2012-10-30
- Inventor: James W. Adkisson , John J. Ellis-Monaghan , Rajendran Krishnasamy , Solomon Mulugeta , Charles F. Musante , Richard J. Rassel
- Applicant: James W. Adkisson , John J. Ellis-Monaghan , Rajendran Krishnasamy , Solomon Mulugeta , Charles F. Musante , Richard J. Rassel
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Anthony Canale
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
CMOS pixel sensor cells with spacer transfer gates and methods of manufacture are provided herein. The method includes forming a middle gate structure on a gate dielectric. The method further includes forming insulation sidewalls on the middle gate structure. The method further includes forming spacer transfer gates on the gate dielectric on opposing sides of the middle gate, adjacent to the insulation sidewalls which isolate the middle gate structure from the spacer transfer gates. The method further includes forming a photo-diode region in electrical contact with one of the spacer transfer gates and a floating diffusion in electrical contact with another of the spacer transfer gates.
Public/Granted literature
- US20120037967A1 CMOS PIXEL SENSOR CELLS WITH POLY SPACER TRANSFER GATES AND METHODS OF MANUFACTURE Public/Granted day:2012-02-16
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