发明授权
US08298853B2 CMOS pixel sensor cells with poly spacer transfer gates and methods of manufacture
有权
具有聚间隔物传输门的CMOS像素传感器单元和制造方法
- 专利标题: CMOS pixel sensor cells with poly spacer transfer gates and methods of manufacture
- 专利标题(中): 具有聚间隔物传输门的CMOS像素传感器单元和制造方法
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申请号: US12853795申请日: 2010-08-10
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公开(公告)号: US08298853B2公开(公告)日: 2012-10-30
- 发明人: James W. Adkisson , John J. Ellis-Monaghan , Rajendran Krishnasamy , Solomon Mulugeta , Charles F. Musante , Richard J. Rassel
- 申请人: James W. Adkisson , John J. Ellis-Monaghan , Rajendran Krishnasamy , Solomon Mulugeta , Charles F. Musante , Richard J. Rassel
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Roberts Mlotkowski Safran & Cole, P.C.
- 代理商 Anthony Canale
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
CMOS pixel sensor cells with spacer transfer gates and methods of manufacture are provided herein. The method includes forming a middle gate structure on a gate dielectric. The method further includes forming insulation sidewalls on the middle gate structure. The method further includes forming spacer transfer gates on the gate dielectric on opposing sides of the middle gate, adjacent to the insulation sidewalls which isolate the middle gate structure from the spacer transfer gates. The method further includes forming a photo-diode region in electrical contact with one of the spacer transfer gates and a floating diffusion in electrical contact with another of the spacer transfer gates.
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