发明授权
- 专利标题: Electromechanical transducer
- 专利标题(中): 机电换能器
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申请号: US12753782申请日: 2010-04-02
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公开(公告)号: US08299550B2公开(公告)日: 2012-10-30
- 发明人: Yoshitaka Zaitsu , Takehiko Kawasaki
- 申请人: Yoshitaka Zaitsu , Takehiko Kawasaki
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Canon USA Inc IP Division
- 优先权: JP2009-096145 20090410
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
When the initial displacement greatly varies among cells in an element, there is a need to reduce a bias voltage to be applied between electrodes. This decreases the sensitivity. An electromechanical transducer of the present invention includes an element having a plurality of cells. Each of the cells includes a first electrode and a second electrode that are provided with a cavity being disposed therebetween. A groove is provided at a position at a predetermined distance from the cavity of the cell on the outermost periphery of the element.
公开/授权文献
- US20100259127A1 ELECTROMECHANICAL TRANSDUCER 公开/授权日:2010-10-14
信息查询
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