发明授权
- 专利标题: Structure of metal e-fuse
- 专利标题(中): 金属电熔丝的结构
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申请号: US12952317申请日: 2010-11-23
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公开(公告)号: US08299567B2公开(公告)日: 2012-10-30
- 发明人: Ping-Chuan Wang , Chunyan E Tian , Ronald Filippi , Wai-kin Li
- 申请人: Ping-Chuan Wang , Chunyan E Tian , Ronald Filippi , Wai-kin Li
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Yuanmin Cai
- 主分类号: H01L29/00
- IPC分类号: H01L29/00
摘要:
Structures of electronic fuses (e-fuse) are provided. An un-programmed e-fuse includes a via of a first conductive material having a bottom and sidewalls with a portion of the sidewalls being covered by a conductive liner and the bottom of the via being formed on top of a dielectric layer, and a first and a second conductive path of a second conductive material formed on top of the dielectric layer with the first and second conductive paths being conductively connected through, and only through, the via at the sidewalls. A programmed e-fuse includes a via; a first conductive path at a first side of the via and being separated from sidewalls of the via by a void; and a second conductive path at a second different side of the via and being in conductive contact with the via through sidewalls of the via.
公开/授权文献
- US20120126363A1 STRUCTURE OF METAL E-FUSE 公开/授权日:2012-05-24