Invention Grant
- Patent Title: Method for sealing an opening
- Patent Title (中): 密封开口的方法
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Application No.: US12086893Application Date: 2006-11-24
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Publication No.: US08304845B2Publication Date: 2012-11-06
- Inventor: Udo Bischof , Holger Hoefer , Volker Schmitz , Axel Grosse , Lutz Mueller , Ralf Hausner
- Applicant: Udo Bischof , Holger Hoefer , Volker Schmitz , Axel Grosse , Lutz Mueller , Ralf Hausner
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102005060870 20051220
- International Application: PCT/EP2006/068869 WO 20061124
- International Announcement: WO2007/071523 WO 20070628
- Main IPC: H01L29/84
- IPC: H01L29/84
Abstract:
An integrated component having a substrate, the substrate having a cavity which surrounds a mechanical structure. The cavity is filled by a fluid of a specific composition under a specific pressure, and the mechanical properties of the mechanical structure are influenced by the fluid.
Public/Granted literature
- US20090174148A1 Method for Sealing an Opening Public/Granted day:2009-07-09
Information query
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