发明授权
- 专利标题: Probe card, method for manufacturing probe card, and prober apparatus
- 专利标题(中): 探针卡,制造探针卡的方法和探测器
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申请号: US12692917申请日: 2010-01-25
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公开(公告)号: US08305102B2公开(公告)日: 2012-11-06
- 发明人: Yoshikazu Takahashi , Hiroshi Ban
- 申请人: Yoshikazu Takahashi , Hiroshi Ban
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Yuanmin Cai
- 优先权: JP2009-44561 20090226
- 主分类号: G01R31/00
- IPC分类号: G01R31/00
摘要:
Embodiments of the present invention provide a probe card in which the positional shift of the tip of a probe can be compensated for in response to a change in the temperature, and a wafer test in a wide range of temperatures can be performed. More specifically, the probe card includes a substrate, a probe composed of a first metallic material having a first thermal expansion coefficient, a base of the probe being joined to the substrate, a tip of the probe coming into contact with a connection terminal of an electronic device, and a thermal compensation member composed of a second metallic material having a second thermal expansion coefficient that is higher than the first thermal expansion coefficient, a base of the thermal compensation member being fixed to the substrate, a tip of the thermal compensation member coming into contact with the probe at an intermediate portion between the base of the probe and the tip of the probe.
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