Invention Grant
US08305163B2 Tunable filter including a surface acoustic wave resonator and a variable capacitor 有权
可调谐滤波器,包括表面声波谐振器和可变电容器

Tunable filter including a surface acoustic wave resonator and a variable capacitor
Abstract:
A tunable filter includes a surface acoustic wave resonator, in which an IDT electrode is defined by an electrode material provided in a recess in an upper surface of a piezoelectric substrate made of LiNbO3 or LiTaO3, and a ZnO film is arranged to cover the upper surface of the piezoelectric substrate, and variable capacitors connected with the surface acoustic wave resonator.
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