发明授权
US08305674B2 Method of manufacturing oscillator device, and optical deflector and optical instrument with oscillator device based on it
有权
制造振荡器装置的方法,以及基于此的振荡器装置的光偏转器和光学仪器
- 专利标题: Method of manufacturing oscillator device, and optical deflector and optical instrument with oscillator device based on it
- 专利标题(中): 制造振荡器装置的方法,以及基于此的振荡器装置的光偏转器和光学仪器
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申请号: US12673694申请日: 2008-10-28
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公开(公告)号: US08305674B2公开(公告)日: 2012-11-06
- 发明人: Suguru Miyagawa , Takahiro Akiyama , Kazutoshi Torashima , Takahisa Kato , Kazunari Fujii
- 申请人: Suguru Miyagawa , Takahiro Akiyama , Kazutoshi Torashima , Takahisa Kato , Kazunari Fujii
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Fitzpatrick, Cella, Harper & Scinto
- 优先权: JP2007-281209 20071030; JP2008-139695 20080528
- 国际申请: PCT/JP2008/069996 WO 20081028
- 国际公布: WO2009/057801 WO 20090507
- 主分类号: G02B26/10
- IPC分类号: G02B26/10
摘要:
A method of manufacturing an oscillator device having an oscillator supported relative to a fixed member by a torsion spring for oscillation around a torsion axis and arranged to be driven at a resonance frequency, which method includes a first step for determining an assumed value of an inertia moment weight of the oscillator, a second step for measuring the resonance frequency, a third step for calculating a spring constant of the torsion spring, from the assumed value of the inertia moment weight and the measured resonance frequency obtained at said first and second steps, a fourth step for calculating an adjustment amount for the inertia moment of the oscillator or for the spring constant of the torsion spring, based on the spring constant calculated at said third step and a target resonance frequency determined with respect to the resonance frequency of the oscillator, so as to adjust the resonance frequency to the target resonance frequency, and a fifth step for adjusting the resonance frequency of the oscillator to the target resonance frequency based on the calculated adjustment amount.
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