Invention Grant
US08305674B2 Method of manufacturing oscillator device, and optical deflector and optical instrument with oscillator device based on it
有权
制造振荡器装置的方法,以及基于此的振荡器装置的光偏转器和光学仪器
- Patent Title: Method of manufacturing oscillator device, and optical deflector and optical instrument with oscillator device based on it
- Patent Title (中): 制造振荡器装置的方法,以及基于此的振荡器装置的光偏转器和光学仪器
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Application No.: US12673694Application Date: 2008-10-28
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Publication No.: US08305674B2Publication Date: 2012-11-06
- Inventor: Suguru Miyagawa , Takahiro Akiyama , Kazutoshi Torashima , Takahisa Kato , Kazunari Fujii
- Applicant: Suguru Miyagawa , Takahiro Akiyama , Kazutoshi Torashima , Takahisa Kato , Kazunari Fujii
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2007-281209 20071030; JP2008-139695 20080528
- International Application: PCT/JP2008/069996 WO 20081028
- International Announcement: WO2009/057801 WO 20090507
- Main IPC: G02B26/10
- IPC: G02B26/10

Abstract:
A method of manufacturing an oscillator device having an oscillator supported relative to a fixed member by a torsion spring for oscillation around a torsion axis and arranged to be driven at a resonance frequency, which method includes a first step for determining an assumed value of an inertia moment weight of the oscillator, a second step for measuring the resonance frequency, a third step for calculating a spring constant of the torsion spring, from the assumed value of the inertia moment weight and the measured resonance frequency obtained at said first and second steps, a fourth step for calculating an adjustment amount for the inertia moment of the oscillator or for the spring constant of the torsion spring, based on the spring constant calculated at said third step and a target resonance frequency determined with respect to the resonance frequency of the oscillator, so as to adjust the resonance frequency to the target resonance frequency, and a fifth step for adjusting the resonance frequency of the oscillator to the target resonance frequency based on the calculated adjustment amount.
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