发明授权
- 专利标题: Detectable defect size and probability-of-detection
- 专利标题(中): 可检测的缺陷尺寸和检测概率
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申请号: US12039582申请日: 2008-02-28
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公开(公告)号: US08306779B2公开(公告)日: 2012-11-06
- 发明人: Shawn J. Beard , Fu-Kuo Chang
- 申请人: Shawn J. Beard , Fu-Kuo Chang
- 申请人地址: US CA Sunnyvale
- 专利权人: Acellent Technologies, Inc.
- 当前专利权人: Acellent Technologies, Inc.
- 当前专利权人地址: US CA Sunnyvale
- 代理机构: Innovation Counsel LLP
- 主分类号: G06F17/18
- IPC分类号: G06F17/18 ; G06F11/00
摘要:
Predicting the probability of detection of major and minor defects in a structure includes simulating a plurality of N defects at random locations in a region specified by an array of transducers. Defect size is incremented until it intersects one path between two transducers. The defect size is again incremented until it intersects two or more adjacent paths between pairs of transducers. The number of major defects up to a selected size is determined by the total number of single path intersections by defects up to the selected size. The number of minor defects up to a selected size is determined on the basis of the total number of defects intersecting two or more paths up to the selected size. The probability of detection up to a selected size is the cumulative number of major or minor defects up to the selected size normalizing by N.
公开/授权文献
- US20080255803A1 DETECTABLE DEFECT SIZE AND PROBABILITY-OF-DETECTION 公开/授权日:2008-10-16
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