Invention Grant
- Patent Title: Method and apparatus for electroplating
- Patent Title (中): 电镀方法和装置
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Application No.: US12291356Application Date: 2008-11-07
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Publication No.: US08308931B2Publication Date: 2012-11-13
- Inventor: Jonathan Reid , Bryan Buckalew , Zhian He , Seyang Park , Seshasayee Varadarajan , Bryan Pennington , Thomas Ponnuswamy , Patrick Breling , Glenn Ibarreta , Steven Mayer
- Applicant: Jonathan Reid , Bryan Buckalew , Zhian He , Seyang Park , Seshasayee Varadarajan , Bryan Pennington , Thomas Ponnuswamy , Patrick Breling , Glenn Ibarreta , Steven Mayer
- Applicant Address: US CA San Jose
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D21/12
- IPC: C25D21/12 ; C25D7/12 ; C25D3/38

Abstract:
An apparatus for electroplating a layer of metal on the surface of a wafer includes an ionically resistive ionically permeable element located in close proximity of the wafer (preferably within 5 mm of the wafer surface) which serves to modulate ionic current at the wafer surface, and a second cathode configured to divert a portion of current from the wafer surface. The ionically resistive ionically permeable element in a preferred embodiment is a disk made of a resistive material having a plurality of perforations formed therein, such that perforations do not form communicating channels within the body of the disk. The provided configuration effectively redistributes ionic current in the plating system allowing plating of uniform metal layers and mitigating the terminal effect.
Public/Granted literature
- US20100032310A1 Method and apparatus for electroplating Public/Granted day:2010-02-11
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