Invention Grant
US08309391B2 Method for manufacturing an array-type nanotube layer of a thin-film solar cell
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制造薄膜太阳能电池阵列型纳米管层的方法
- Patent Title: Method for manufacturing an array-type nanotube layer of a thin-film solar cell
- Patent Title (中): 制造薄膜太阳能电池阵列型纳米管层的方法
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Application No.: US13032794Application Date: 2011-02-23
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Publication No.: US08309391B2Publication Date: 2012-11-13
- Inventor: Nan-Hui Yeh
- Applicant: Nan-Hui Yeh
- Agency: Rosenberg, Klein & Lee
- Priority: TW99129849A 20100903
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
A method for manufacturing an array-type nanotube layer for a thin-film solar cell comprises the steps of: preparing an isotropic Si-substrate; sputtering a metal Ti layer onto the isotropic Si-substrate; heat-treating the Ti-coated Si-substrate in a vacuum heat-treatment environment; annealing the Ti-coated Si-substrate in an annealing heat-treatment environment to produce an intermediate-phase metal Ti layer; anodizing the intermediate-phase metal Ti layer so as to transform the intermediate-phase metal Ti layer into an array-type nanotube layer for the solar cell; and finally applying a reverse voltage to separate the array-type nanotube layer from the isotropic Si-substrate.
Public/Granted literature
- US20120058594A1 METHOD FOR MANUFACTURING AN ARRAY-TYPE NANOTUBE LAYER OF A THIN-FILM SOLAR CELL Public/Granted day:2012-03-08
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