Invention Grant
US08310012B2 Semiconductor device having metal gate and manufacturing method thereof
有权
具有金属栅极的半导体器件及其制造方法
- Patent Title: Semiconductor device having metal gate and manufacturing method thereof
- Patent Title (中): 具有金属栅极的半导体器件及其制造方法
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Application No.: US12759670Application Date: 2010-04-13
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Publication No.: US08310012B2Publication Date: 2012-11-13
- Inventor: Guang-Yaw Hwang , Yu-Ru Yang , Jiunn-Hsiung Liao , Pei-Yu Chou
- Applicant: Guang-Yaw Hwang , Yu-Ru Yang , Jiunn-Hsiung Liao , Pei-Yu Chou
- Applicant Address: TW Hsin-Chu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/3205

Abstract:
A semiconductor device includes a semiconductor substrate, a gate dielectric layer formed on the semiconductor substrate, and at least a first conductive-type metal gate formed on the gate dielectric layer. The first conductive-type metal gate includes a filling metal layer and a U-type metal layer formed between the filling metal layer and the gate dielectric layer. A topmost portion of the U-type metal layer is lower than the filling metal layer.
Public/Granted literature
- US20110248359A1 SEMICONDUCTOR DEVICE HAVING METAL GATE AND MANUFACTURING METHOD THEREOF Public/Granted day:2011-10-13
Information query
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