发明授权
- 专利标题: Method of manufacturing a projection objective and projection objective
- 专利标题(中): 制造投影物镜和投影物镜的方法
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申请号: US12413981申请日: 2009-03-30
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公开(公告)号: US08310752B2公开(公告)日: 2012-11-13
- 发明人: Heiko Feldmann , Toralf Gruner , Alexander Epple
- 申请人: Heiko Feldmann , Toralf Gruner , Alexander Epple
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT GmbH
- 当前专利权人: Carl Zeiss SMT GmbH
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 优先权: EP06024789 20061130
- 主分类号: G02B17/00
- IPC分类号: G02B17/00
摘要:
The disclosure relates to a method of manufacturing a projection objective, and a projection objective, such as a projection objective configured to be used in a microlithographic process. The method can include defining an initial design for the projection objective and optimizing the design using a merit function. The method can be used in the manufacturing of projection objectives which may be used in a microlithographic process of manufacturing miniaturized devices.
公开/授权文献
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B17/00 | 有或无折射元件的具有反射面的系统 |