发明授权
US08314258B2 Method for producing acrylate derivative, acrylate derivative, and intermediate thereof 有权
丙烯酸酯衍生物,丙烯酸酯衍生物及其中间体的制造方法

Method for producing acrylate derivative, acrylate derivative, and intermediate thereof
摘要:
Provided are 1) a production process for an acrylic ester derivative capable of being a raw material of a polymer for obtaining a photoresist composition capable of forming a photoresist film which is excellent in a reactivity to acid and a heat stability and is less swollen in developing and which has a refractive index of preferably 1.72 or more in 193 nm and can be patterned, 2) an acrylic ester derivative obtained by the above production process and 3) alcohol and ester which are synthetic intermediates for the above acrylic ester derivative.
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