发明授权
- 专利标题： Apparatus and method for manufacturing light source device
- 专利标题（中）： 光源装置制造装置及方法
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申请号： US12782745申请日： 2010-05-19
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公开(公告)号： US08314378B2公开(公告)日： 2012-11-20
- 发明人: Shinichi Oe , Kazutaka Ikeda , Akira Nakamura , Takayuki Yanagisawa
- 申请人： Shinichi Oe , Kazutaka Ikeda , Akira Nakamura , Takayuki Yanagisawa
- 申请人地址： JP Chiyoda-Ku, Tokyo
- 专利权人： Mitsubishi Electric Corporation
- 当前专利权人： Mitsubishi Electric Corporation
- 当前专利权人地址： JP Chiyoda-Ku, Tokyo
- 代理机构： Buchanan Ingersoll & Rooney PC
- 优先权： JP2009-268774 20091126
- 主分类号： H01L21/66
- IPC分类号： H01L21/66 ; G02F1/37
摘要：
A light source manufacturing apparatus, which manufactures a light source device by adhering a laser device and a wavelength converting device that converts the laser light emitted by the laser device to laser light of a different wavelength, includes a first stage that holds the wavelength converting device, a second stage that holds the laser device, a power meter that measures the amount of laser light emitted by the wavelength converting device, a light receiving device that detects the drive waveform of the laser light, and a controlling unit that changes relative positions of the first stage and the second stage in such a manner that the amount of laser light measured by the power meter is a predetermined value or greater and the drive waveform detected by the light receiving device falls within a reference range.
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