发明授权
US08316693B2 Surface analysis and measurement method based on flow resistance of fluid and atomic force microscope using the method 失效
基于流体和原子力显微镜的流动阻力的表面分析和测量方法

Surface analysis and measurement method based on flow resistance of fluid and atomic force microscope using the method
摘要:
Provided is a surface analysis and measurement method based on the flow resistance of a fluid. The method comprises: spraying a fluid on the surface of a sample; identifying and determining if a flow resistance value of the fluid colliding with the sample surface is optimal for the measurement of the surface topography of the sample; setting the determined optimal flow resistance value to a reference value and moving the sample in the X-Y axes to allow the entire surface of the sample to be scanned; varying the position of the sample in the Z axis together with the X-Y axis movement to adjust varying flow resistance values of the fluid along the irregular surface topography of the sample to the set flow resistance value during scanning; and expressing the movement ranges of the sample in the X, Y and Z axes as numerical values and representing the numerical values as brightness values on a computer screen to display the surface topography of the sample. Further provided is an atomic force microscope using the method.
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