发明授权
- 专利标题: Surface analysis and measurement method based on flow resistance of fluid and atomic force microscope using the method
- 专利标题(中): 基于流体和原子力显微镜的流动阻力的表面分析和测量方法
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申请号: US12625998申请日: 2009-11-25
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公开(公告)号: US08316693B2公开(公告)日: 2012-11-27
- 发明人: Sung Jin Kim , Tae Young Kim , Dong Kwon Kim
- 申请人: Sung Jin Kim , Tae Young Kim , Dong Kwon Kim
- 申请人地址: KR Daejeon
- 专利权人: Korea Advanced Institute of Science and Technology
- 当前专利权人: Korea Advanced Institute of Science and Technology
- 当前专利权人地址: KR Daejeon
- 代理机构: Sughrue Mion, PLLC
- 优先权: KR10-2008-0119103 20081127
- 主分类号: G01B13/16
- IPC分类号: G01B13/16
摘要:
Provided is a surface analysis and measurement method based on the flow resistance of a fluid. The method comprises: spraying a fluid on the surface of a sample; identifying and determining if a flow resistance value of the fluid colliding with the sample surface is optimal for the measurement of the surface topography of the sample; setting the determined optimal flow resistance value to a reference value and moving the sample in the X-Y axes to allow the entire surface of the sample to be scanned; varying the position of the sample in the Z axis together with the X-Y axis movement to adjust varying flow resistance values of the fluid along the irregular surface topography of the sample to the set flow resistance value during scanning; and expressing the movement ranges of the sample in the X, Y and Z axes as numerical values and representing the numerical values as brightness values on a computer screen to display the surface topography of the sample. Further provided is an atomic force microscope using the method.
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