发明授权
- 专利标题: Film coating system and isolating device thereof
- 专利标题(中): 薄膜涂布系统及其隔离装置
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申请号: US11954843申请日: 2007-12-12
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公开(公告)号: US08316796B2公开(公告)日: 2012-11-27
- 发明人: Chi-Hung Liu , Chih-Ming Chen , Chun-Hsien Su , Chih-Wei Chen , Wen-Tung Hsu , Chun-Hung Lin
- 申请人: Chi-Hung Liu , Chih-Ming Chen , Chun-Hsien Su , Chih-Wei Chen , Wen-Tung Hsu , Chun-Hung Lin
- 申请人地址: TW Hsinchu
- 专利权人: Industrial Technology Research Institute
- 当前专利权人: Industrial Technology Research Institute
- 当前专利权人地址: TW Hsinchu
- 优先权: TW96133679A 20070910
- 主分类号: C23C16/00
- IPC分类号: C23C16/00
摘要:
A film coating system for coating an object includes a working station and an isolating device. The object is disposed on the working station, and the isolating device is utilized to isolate the object. The isolating device includes a body generating a first power, a first working fluid, a second working fluid, a first guiding portion and a second guiding portion. The first guiding portion guides the first working fluid to pass through the body, thereby forming a first working region to coat the object thereon. The second guiding portion guides the second working fluid excited by the first power of the body to pass through the body, thereby forming a second working region to separate the first working region from the object.
公开/授权文献
- US20090064933A1 FILM COATING SYSTEM AND ISOLATING DEVICE THEREOF 公开/授权日:2009-03-12
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