Invention Grant
US08319428B2 Sealing film for organic EL element, organic EL element, and organic EL display
有权
有机EL元件用密封膜,有机EL元件和有机EL显示器
- Patent Title: Sealing film for organic EL element, organic EL element, and organic EL display
- Patent Title (中): 有机EL元件用密封膜,有机EL元件和有机EL显示器
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Application No.: US12999537Application Date: 2009-06-29
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Publication No.: US08319428B2Publication Date: 2012-11-27
- Inventor: Kazuya Adachi
- Applicant: Kazuya Adachi
- Applicant Address: JP
- Assignee: Sharp Kabushiki Kaisha
- Current Assignee: Sharp Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- International Application: PCT/JP2009/061862 WO 20090629
- International Announcement: WO2011/001492 WO 20110106
- Main IPC: H01L51/50
- IPC: H01L51/50

Abstract:
An object of this invention is to provide a sealing film for an organic EL element having excellent moisture resistance, due to the absence of pinholes. A sealing film of this invention is a sealing film for an organic EL element having a layered structure of at least three layers with a silicon nitride film and a silicon oxynitride film layered in alternation, and is characterized in that odd-numbered layers from the side of the organic EL element are silicon nitride films having a film thickness (T1) of 200 nm or greater, and even-numbered layers from the side of the organic EL element are silicon oxynitride films having a film thickness (T2) of 20 nm or greater and 50 nm or less.
Public/Granted literature
- US20120104945A1 SEALING FILM FOR ORGANIC EL ELEMENT, ORGANIC EL ELEMENT, AND ORGANIC EL DISPLAY Public/Granted day:2012-05-03
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