发明授权
US08319961B2 Apparatus to perform a non-contact test of a semiconductor package
有权
用于执行半导体封装的非接触测试的装置
- 专利标题: Apparatus to perform a non-contact test of a semiconductor package
- 专利标题(中): 用于执行半导体封装的非接触测试的装置
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申请号: US12632960申请日: 2009-12-08
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公开(公告)号: US08319961B2公开(公告)日: 2012-11-27
- 发明人: Chang-Hyun Ryu , Ssang-Gun Lim , Dong-Hae Son , Poom-Seong Park
- 申请人: Chang-Hyun Ryu , Ssang-Gun Lim , Dong-Hae Son , Poom-Seong Park
- 申请人地址: KR Suwon-si KR Daejeon
- 专利权人: SAMSUNG Electronics Co., Ltd.,INTEKPLUS Co., Ltd.
- 当前专利权人: SAMSUNG Electronics Co., Ltd.,INTEKPLUS Co., Ltd.
- 当前专利权人地址: KR Suwon-si KR Daejeon
- 代理机构: Stanzione & Kim, LLP
- 优先权: KR10-2008-0124144 20081208
- 主分类号: G01N21/00
- IPC分类号: G01N21/00
摘要:
An apparatus to test a semiconductor package includes a vertical illuminator to supply vertical illumination in the same axial direction as a measurement target and a vertical image unit to capture a vertical image of the measurement target so that a testing apparatus may 2-dimensionally determine information on the shape, size, or position of a solder ball. An inclined illuminator may supply inclined illumination in a different axial direction from the measurement target, and an inclined image capture unit may capture a side image of the measurement target so that the testing apparatus may 3-dimensionally determine information on a state of contact of the solder ball with the ball land. The inclined image capture unit may include a color camera using color information, thereby markedly increasing test reliability and yield.
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