发明授权
US08321815B2 Recording medium storing original data generation program, original data generation method, original fabricating method, exposure method, and device manufacturing method
有权
存储原始数据生成程序，原始数据生成方法，原始制作方法，曝光方法和装置制造方法的记录介质
- 专利标题： Recording medium storing original data generation program, original data generation method, original fabricating method, exposure method, and device manufacturing method
- 专利标题（中）： 存储原始数据生成程序，原始数据生成方法，原始制作方法，曝光方法和装置制造方法的记录介质
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申请号： US12512649申请日： 2009-07-30
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公开(公告)号： US08321815B2公开(公告)日： 2012-11-27
- 发明人: Kenji Yamazoe , Tokuyuki Honda
- 申请人： Kenji Yamazoe , Tokuyuki Honda
- 申请人地址： JP Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JP Tokyo
- 代理机构： Canon USA, Inc., IP Division
- 优先权： JP2008-203251 20080806
- 主分类号： G06F17/50
- IPC分类号： G06F17/50
摘要：
To calculate data of an original, a computer is caused to execute the following steps of converting data regarding an intended pattern to be formed on a substrate into frequency-domain data, calculating a two-dimensional transmission cross coefficient using a function representing an effective light source that an illumination device forms on a pupil plane of a projection optical system when the original is absent on an object plane of the projection optical system and using a pupil function of the projection optical system, calculating a diffracted light distribution from a pattern that is formed on the object plane using both the frequency-domain data and data of at least one component of the calculated two-dimensional transmission cross coefficient, and converting data of the calculated diffracted light distribution into spatial-domain data to determine the data of the original.
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