发明授权
- 专利标题： End effector for a cluster tool
- 专利标题（中）： 用于集群工具的末端执行器
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申请号： US12422867申请日： 2009-04-13
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公开(公告)号： US08322963B2公开(公告)日： 2012-12-04
- 发明人: Jeffrey C. Hudgens , Jagan Rangarajan , Michael R. Rice , Penchala N. Kankanala
- 申请人： Jeffrey C. Hudgens , Jagan Rangarajan , Michael R. Rice , Penchala N. Kankanala
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Patterson & Sheridan, LLP
- 主分类号： B65H5/00
- IPC分类号： B65H5/00
摘要：
Embodiments of the present invention generally provide an apparatus and method for transferring substrates in a processing system (e.g., a cluster tool) that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint when compared to conventional techniques.
公开/授权文献
- US20090263215A1 END EFFECTOR FOR A CLUSTER TOOL 公开/授权日：2009-10-22
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