发明授权
- 专利标题: Thermal bubble type angular accelerometer
- 专利标题(中): 热气泡型角加速度计
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申请号: US12906866申请日: 2010-10-18
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公开(公告)号: US08327707B2公开(公告)日: 2012-12-11
- 发明人: Jium Ming Lin
- 申请人: Jium Ming Lin
- 申请人地址: TW Hsinchu
- 专利权人: Chung Hua University
- 当前专利权人: Chung Hua University
- 当前专利权人地址: TW Hsinchu
- 代理机构: WPAT, P.C.
- 代理商 Anthony King
- 优先权: TW98136612A 20091029
- 主分类号: G01P15/00
- IPC分类号: G01P15/00 ; C23F1/00
摘要:
An RFID, Bluetooth as well as zigbee based thermal bubble type angular accelerometer includes a flexible substrate, a base layer, at least one cavity, and at least one sensing assembly. The base layer is formed on the flexible substrate. The at least one cavity is formed on the base layer. The at least one sensing assembly is suspended over the at least one cavity. The sensing assembly comprises a heater and two temperature sensing elements, wherein the two temperature sensing elements are substantially symmetrically disposed on opposite sides of the heater, and the heaters and the two temperature sensing elements extend in a radial direction.
公开/授权文献
- US20110100123A1 Thermal Bubble Type Angular Accelerometer 公开/授权日:2011-05-05
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