发明授权
US08329524B2 Surface emitting laser, method for producing surface emitting laser, and image forming apparatus 有权
表面发射激光器,表面发射激光器的制造方法和成像装置

  • 专利标题: Surface emitting laser, method for producing surface emitting laser, and image forming apparatus
  • 专利标题(中): 表面发射激光器,表面发射激光器的制造方法和成像装置
  • 申请号: US13413973
    申请日: 2012-03-07
  • 公开(公告)号: US08329524B2
    公开(公告)日: 2012-12-11
  • 发明人: Mitsuhiro Ikuta
  • 申请人: Mitsuhiro Ikuta
  • 申请人地址: JP Tokyo
  • 专利权人: Canon Kabushiki Kaisha
  • 当前专利权人: Canon Kabushiki Kaisha
  • 当前专利权人地址: JP Tokyo
  • 代理机构: Canon U.S.A., Inc. IP Division
  • 优先权: JP2009-175390 20090728
  • 主分类号: H01L33/06
  • IPC分类号: H01L33/06
Surface emitting laser, method for producing surface emitting laser, and image forming apparatus
摘要:
A surface emitting laser includes a lower multilayer mirror, an active layer, and an upper multilayer mirror stacked onto a substrate. A first current confinement layer having a first electrically conductive region and a first insulating region is formed above or below the active layer using a first trench structure. A second current confinement layer having a second electrically conductive region and a second insulating region is formed above or below the first current confinement layer using a second trench structure. The first and second trench structures extend from a top surface of the upper multilayer mirror towards the substrate such that the second trench structure surrounds the first trench structure. When the surface emitting laser is viewed in an in-plane direction of the substrate, a boundary between the first electrically conductive region and the first insulating region is disposed inside the second electrically conductive region.
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