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US08329574B2 Methods of fabricating flash memory devices having shared sub active regions 有权
制造具有共享子有源区的闪存器件的方法

Methods of fabricating flash memory devices having shared sub active regions
摘要:
Flash memory devices include a pair of elongated, closely spaced-apart main active regions in a substrate. A sub active region is also provided in the substrate, extending between the pair of elongated, closely spaced-apart main active regions. A bit line contact plug is provided on, and electrically contacting, the sub active region and being at least as wide as the sub active region. An elongated bit line is provided on, and electrically contacting, the bit line contact plug remote from the sub active region.
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