发明授权
- 专利标题: Mask design elements to aid circuit editing and mask redesign
- 专利标题(中): 面罩设计元素,以帮助电路编辑和面具重新设计
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申请号: US11933841申请日: 2007-11-01
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公开(公告)号: US08330159B2公开(公告)日: 2012-12-11
- 发明人: Jeffrey Lee Large , Henry Litzmann Edwards , Ayman A. Fayed , Patrick Cruise , Kah Mun Low , Neeraj Nayak , Oguz Altun , Chris Barr
- 申请人: Jeffrey Lee Large , Henry Litzmann Edwards , Ayman A. Fayed , Patrick Cruise , Kah Mun Low , Neeraj Nayak , Oguz Altun , Chris Barr
- 申请人地址: US TX Dallas
- 专利权人: Texas Instruments Incorporated
- 当前专利权人: Texas Instruments Incorporated
- 当前专利权人地址: US TX Dallas
- 代理商 Frederick J. Telecky, Jr.; Michael A. Davis, Jr.; Warren L. Franz
- 主分类号: H01L23/58
- IPC分类号: H01L23/58 ; H01L23/48
摘要:
An integrated circuit (IC) includes a substrate having a device layer and a plurality of metal layers formed thereon. The plurality of metal layers include patterned upper metal layers and lower metal layers, a multi-level metal interconnect structure formed using the plurality of metal layers, where the interconnect structure is in electrical contact with a first portion and second portion of the device layer. At least one circuit editing structure including a first and second columns are formed using at least a portion of the plurality of metal layers, the first column being in electrical contact with the first portion of the device layer and the second column being in electrical contact with second portion of the device layer, where a portion of the first and second columns define a circuit editing feature operable to electrically couple or decouple the columns using focused ion beam (FIB) processing.
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