发明授权
- 专利标题: Method for manufacturing a perpendicular magnetic recording transducer
- 专利标题(中): 垂直磁记录传感器的制造方法
-
申请号: US11192591申请日: 2005-07-29
-
公开(公告)号: US08333008B1公开(公告)日: 2012-12-18
- 发明人: Kyusik Sin , Lei Wang , Yingjian Chen
- 申请人: Kyusik Sin , Lei Wang , Yingjian Chen
- 申请人地址: US CA Fremont
- 专利权人: Western Digital (Fremont), LLC
- 当前专利权人: Western Digital (Fremont), LLC
- 当前专利权人地址: US CA Fremont
- 主分类号: G11B5/127
- IPC分类号: G11B5/127 ; H04R31/00
摘要:
A method and system for fabricating a perpendicular magnetic recording head, and the head so formed, are described. The method includes depositing an underlayer directly on an insulating layer. The underlayer preferably includes at least one of a nonferromagnetic metal, silicon oxide, and silicon nitride. A pole layer, which has a pole removal rate, is provided on the underlayer. The method and system further include forming a perpendicular magnetic recording pole from the pole layer. The perpendicular magnetic recording pole has a top and a bottom that is narrower than the top. The process of forming the perpendicular magnetic recording pole further includes removing a portion of the pole layer such that a pole removal rate for the pole layer is less than or substantially equal to a removal rate of the underlayer during the removing step.
信息查询
IPC分类: