发明授权
- 专利标题: Non-volatile semiconductor storage device and method of manufacturing the same
- 专利标题(中): 非易失性半导体存储装置及其制造方法
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申请号: US12886854申请日: 2010-09-21
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公开(公告)号: US08335111B2公开(公告)日: 2012-12-18
- 发明人: Yoshiaki Fukuzumi , Ryota Katsumata , Megumi Ishiduki , Hideaki Aochi
- 申请人: Yoshiaki Fukuzumi , Ryota Katsumata , Megumi Ishiduki , Hideaki Aochi
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2010-157822 20100712
- 主分类号: G11C16/04
- IPC分类号: G11C16/04 ; H01L29/792 ; H01L21/336
摘要:
A non-volatile semiconductor storage device includes: a memory string; a select transistor; and a carrier selection element. The select transistor has one end connected to one end of the memory string. The carrier selection element has one end connected to the other end of the select transistor, and selects a majority carrier flowing through respective bodies of the memory transistors and the select transistor. The carrier selection element includes: a third semiconductor layer; a metal layer; a second gate insulation layer; and a third conductive layer. The metal layer extends in the vertical direction. The metal layer extends in the vertical direction from the top of the third semiconductor layer. The second gate insulation layer surrounds the third semiconductor layer and the metal layer. The third conductive layer surrounds the third semiconductor layer and the metal layer via the second gate insulation layer and extends in a parallel direction.
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