Invention Grant
US08336337B2 Method and device for producing a blank mold from synthetic quartz glass by using a plasma-assisted deposition method
有权
通过使用等离子体辅助沉积法从合成石英玻璃制造空白模具的方法和装置
- Patent Title: Method and device for producing a blank mold from synthetic quartz glass by using a plasma-assisted deposition method
- Patent Title (中): 通过使用等离子体辅助沉积法从合成石英玻璃制造空白模具的方法和装置
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Application No.: US10519016Application Date: 2003-07-07
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Publication No.: US08336337B2Publication Date: 2012-12-25
- Inventor: Richard Schmidt , Karsten Bräuer
- Applicant: Richard Schmidt , Karsten Bräuer
- Applicant Address: DE Hanau
- Assignee: Heraeus Quarzglas GmbH & Co. KG
- Current Assignee: Heraeus Quarzglas GmbH & Co. KG
- Current Assignee Address: DE Hanau
- Agency: Tiajoloff and Kelly LLP
- Priority: DE10231037 20020709
- International Application: PCT/EP03/07233 WO 20030707
- International Announcement: WO2004/005206 WO 20040115
- Main IPC: C03B37/018
- IPC: C03B37/018

Abstract:
The invention relates to a method for producing a blank mold from synthetic quartz glass by using a plasma-assisted deposition method, according to which a hydrogen-free media flow containing a glass starting material and a carrier gas is fed to a multi-nozzle deposition burner. The glass starting material is introduced into a plasma zone by the deposition burner and is oxidized therein while forming SiO2 particles, and the SiO2 particles are deposited on a deposition surface while being directly vitrified. In order to increase the deposition efficiency, the invention provides that the deposition burner (1) focuses the media flow toward the plasma zone (4) by. A multi-nozzle plasma burner, which is suited for carrying out the method and which is provided with a media nozzle for feeding a media flow to the plasma zone, is characterized in that the media nozzle (7) is designed so that it is focussed toward the plasma zone (4). The focussing is effected by a tapering (6) of the media nozzle (7).
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